THE OXYGEN RATIO AFFECTING STRUCTURAL PHASE TRANSITIONS AND MEMBRANE PROPERTIES I p-SnOX:Na FABRICATED BY DC MAGNETRON REACTION SPUTTERING METHOD
Main Article Content
Abstract
The p-SnOx:Na semiconductor membrane was fabricated by DC magnetron sputtering using an alloy target composed of tin and 3 at % sodium, and an oxygen-reactive gas. The fractional oxygen gas (O2) was varied at percentages of 7%, 12%, 20%, and 45%, while the base temperature (Ts) was kept constant at 200°C during sputtering. As the oxygen ratio increased from 7% to 45%, the SnOx:Na membrane underwent a phase transition in its structure, transforming from SnO polycrystalline to amorphous SnO, Sn3O4, SnO2, and SnO2 polycrystalline phases. The SnOx:Na membrane properties were evaluated using UV-Vis spectroscopy, X-ray diffraction (XRD), and Hall effect measurements. The p-type SnO membrane was then used to fabricate a photodiode with an n-i-p structure (FTO/n-nc-Si:H/a-Si:H/p-SnO/Cu). The resulting photodiode exhibited a high ratio of Ion/Ioff = 56.
Keywords
N type SnO2, Photodiode n-i-p, P type SnO, reactive DC magnetron sputtering, Tin oxide thin films
Article Details
References
Ahn, J. S., Pode, R., & Lee, K. B. (2016). Study of Cu-doped SnO thin films prepared by reactive co-sputtering with facing targets of Sn and Cu. Thin Solid Films, 608, 102-106.
Doi: 10.1016/j.tsf.2016.04.024
Ahn, J. S., Pode, R., & Lee, K. B. (2016). Study of Cu-doped SnO thin films prepared by reactive co-sputtering with facing targets of Sn and Cu. Thin Solid Films, 608, 102-106.
Doi: 10.1016/j.tsf.2016.04.024
Ali, S. M., Hussain, S. T., Bakar, S. A., Muhammad, J., & Rehman, N. U. (2013). Effect of doping on the Structural and Optical Properties of SnO2Thin Films fabricated by Aerosol Assisted Chemical Vapor Deposition. Journal of Physics: Conference Series, 439(1).
Doi: 10.1088/1742-6596/439/1/012013
Becker, M., Michel, F., Polity, A., & Klar, P. (2018). Assessing the growth window of stannous oxide by ion beam sputter deposition (IBSD). Journal of Crystal Growth, 498, 17-24.
Doi: 10.1016/j.jcrysgro.2018.05.009
Becker, M., Hamann, R., Hartung, D., Voget, G. C., Gaubner, S., … Kalr, P. (2019). Controlling the p-type conductivity of SnO by doping with nitrogen and hydrogen. Journal of Applied Physics, 125(8), 085703. Doi: 10.1063/1.5052606.
Bu, I. Y. Y. (2016). Sol-gel production of p-type ZnO thin film by using sodium doping. Superlattices and Microstructures, 96, 59-66. Doi: 10.1016/j.spmi.2016.05.011
Caraveo-Frescas, J. A., Nayak, P. K., Al-Jawhari, H. A., Granato, D. B., Schwingenschlögl, U., & Alshareef, H. N. (2013). Record mobility in transparent p-type tin monoxide films and devices by phase engineering. ACS Nano, 7(6), 5160-5167. Doi: 10.1021/nn400852r
Dai, L. P., Deng, H., Mao, F. Y., & Zang, J. D. (2008). The recent advances of research on p-type ZnO thin film. Journal of Materials Science: Materials in Electronics, 19(8-9), 727-734.
Doi: 10.1007/s10854-007-9398-y
Granato, D. B., Caraveo-Frescas, J. A., Alshareef, H. N., & Schwingenschlögl, U. (2013). Enhancement of p-type mobility in tin monoxide by native defects. Applied Physics Letters, 102, 212105. Doi: 10.1063/1.4808382.
Guillén, C., & Herrero, J. (2019). P-type SnO thin films prepared by reactive sputtering at high deposition rates. Journal of Materials Science and Technology, 35(8), 1706-1711. Doi: 10.1016/j.jmst.2019.03.034
Guo, W., Zhang, Y., Liu, Z., & Wu, H. (2010). Microstructure, optical, and electrical properties of p-type SnO thin films. Applied Physics Letters, 96(4), 12-15. Doi: 10.1063/1.3277153
Hien, V. X., Lee, J. H., Kim, J. J., & Heo, Y. W. (2014). Structure and NH3 sensing properties of SnO thin film deposited by RF magnetron sputtering. Sensors and Actuators B: Chemical, 194, 134-141. Doi: 10.1016/j.snb.2013.12.086
Jang, Y., Lee, H., & Char, K. (2020). Transparent thin film transistors of polycrystalline SnO2-x and epitaxial SnO2-x. AIP Advances, 10(3). Doi: 10.1063/1.5143468.
Kim, H. Y., Nam, J. H., George, S. M., Park, J. S., Park, B. K., Kim, G. H., ... Han, J. H. (2019). Phase-controlled SnO2 and SnO growth by atomic layer deposition using Bis (N-ethoxy-2, 2-dimethyl propanamido) tin precursor. Ceramics International, 45(4), 5124-5132.
Doi: 10.1016/j.ceramint.2018.09.263
Lee, J. H., Lee, J. H., Choi, Y., Kim, J. J., & Kim, D. H. (2021). Undoped tin dioxide transparent electrodes for efficient and cost-effective indoor organic photovoltaics (SnO2 electrode for indoor organic photovoltaics). NPG Asia Materials, 13(1). Doi: 10.1038/s41427-021-00310-2
Lee, S. J., Choi, S. M., Kim, M. K., Yoon, J. W., & Kim, K. H. (2018). Composition, Microstructure and Electrical Performances of Sputtered SnO Thin Film for p-Type Oxide Semiconductor. ACS Applied Materials & Interfaces, 10(52), 45090-45098. Doi: 10.1021/acsami.7b17906
Liang, L. Y., Liu, Z. M., Cao, H. T., & Pan, X. Q. (2010). Microstructural, optical, and electrical properties of SnO thin films prepared on quartz via a two-step method. ACS Applied Materials & Interfaces, 2(4), 1060-1065. Doi: 10.1021/am900838z
Luangchaisri, C., Dumrongrattana, S., & Rakkwamsuk, P. (2012). Effect of heat treatment on electrical properties of fluorine doped tin dioxide films prepared by ultrasonic spray pyrolysis technique. Procedia Engineering, 32, 663-669. Doi: 10.1016/j.proeng.2012.01.1324
Luo, H., Liang, L. Y., Cao, H. T., Liu, Z. M., & Zhuge, F. (2012). Structural, Chemical, Optical, and Electrical Evolution of SnOx Films Deposited by Reactive rf Magnetron Sputtering. Applied Materials & Interfaces, 4, 5673-5677. Doi: 10.1021/am3015215
Minami, T. (2000). New n-Type TCOs. MRS Bulletin, 25(8), 38-44.
Pan, L., Li, W., Yang, S. E., Zang, J., Guo, H., Xia, T., ... Chen, Y. (2019). Effects of annealing conditions on the properties of SnO films deposited by e-beam evaporation process. Materials Letters, 257, 126737. Doi: 10.1016/j.matlet.2019.126737
Pham, H. P., Nguyen, Q. L., Pham, V. H., Nguyen, V. L., Nguyen, H. K., Nguyen, H. T., ... Nguyen, H. T. (2019). Effects of substrate temperature on characteristics of the p-type Ag-doped SnOx thin films prepared by reactive DC magnetron sputtering. Journal of Photochemistry and Photobiology A: Chemistry, 388, 112157. Doi: 10.1016/j.jphotochem.2019.112157
Pham, H. P., Thuy, T. G. L., Tran, Q. T., Nguyen, H. H., My Hoa, H. T., Thi Thu, H., & Cuong, T. V. (2017). Characterization of Ag-doped p-type SnO thin films prepared by DC magnetron sputtering. Journal of Nanomaterials, 2017. Doi: 10.1155/2017/8360823
Priyanka, L., Hymavathi, B., & Kumar, B. R. (2020). Effect of rotational speed on structural and optical properties of spin coated SnO thin films. IOP Conference Series: Materials Science and Engineering, 998(1). Doi: 10.1088/1757-899X/998/1/012012
Singh, C. C., Roy Choudhury, A. N., Sutar, D. S., & Sarkar, S. K. (2021). Plasma-assisted combustion synthesis of p -type transparent Cu incorporated NiO thin films - Correlation between deposition chemistry and charge transport characteristics. Journal of Applied Physics, 129(9), 095304. Doi: 10.1063/5.0036015
So, H. S., Park, J. W., Jung, D. H., Ko, K. H., & Lee, H. (2015). Optical properties of amorphous and crystalline Sb-doped SnO2 thin films studied with spectroscopic ellipsometry: Optical gap energy and effective mass. Journal of Applied Physics, 118(8). Doi: 10.1063/1.4929487
Suman, P. H., Felix, A. A., Tuller, H. L., Varela, J. A., & Orlandi, M. O. (2015). Comparative gas sensor response of SnO2, SnO and Sn3O4 nanobelts to NO2 and potential interferents. Sensors and Actuators B: Chemical, 208, 122-127. Doi: 10.1016/j.snb.2014.10.119
Togo, A., et al. (2006). First-principles calculations of native defects in tin monoxide. Physical Review B - Condensed Matter and Materials Physics, 74(19), 195128.
Doi: 10.1103/PhysRevB.74.195128
Togo, A., Oba, F., Tanaka, I., & Tatsumi, K. (2006). First-principles calculations of native defects in tin monoxide. Physical Review B - Condensed Matter and Materials Physics, 74(19), 195128. Doi: 10.1103/PhysRevB.74.195128
Varley, J. B. et al. (2013). Ambipolar doping in SnO. Applied Physics Letters, 103(8).
Doi: 10.1063/1.4819068
Wasly, H. S., El-Sadek, A., Elnobi, S., & Abuelwafa, A. A. (2022). Morphological, structural, and optical properties of flexible Tin Oxide (II) thin film via thermal evaporation technique. The European Physical Journal Plus, 137(1), 1-10. Doi: 10.1140/epjp/s13360-022-02349-8
Yang, Y., Pritzker, M., & Li, Y. (2019). Electrodeposited p-type Cu2O thin films at high pH for all-oxide solar cells with improved performance. Thin Solid Films, 676, 42-53.
Doi: 10.1016/j.tsf.2019.02.014
Doi: 10.1016/j.tsf.2016.04.024
Ahn, J. S., Pode, R., & Lee, K. B. (2016). Study of Cu-doped SnO thin films prepared by reactive co-sputtering with facing targets of Sn and Cu. Thin Solid Films, 608, 102-106.
Doi: 10.1016/j.tsf.2016.04.024
Ali, S. M., Hussain, S. T., Bakar, S. A., Muhammad, J., & Rehman, N. U. (2013). Effect of doping on the Structural and Optical Properties of SnO2Thin Films fabricated by Aerosol Assisted Chemical Vapor Deposition. Journal of Physics: Conference Series, 439(1).
Doi: 10.1088/1742-6596/439/1/012013
Becker, M., Michel, F., Polity, A., & Klar, P. (2018). Assessing the growth window of stannous oxide by ion beam sputter deposition (IBSD). Journal of Crystal Growth, 498, 17-24.
Doi: 10.1016/j.jcrysgro.2018.05.009
Becker, M., Hamann, R., Hartung, D., Voget, G. C., Gaubner, S., … Kalr, P. (2019). Controlling the p-type conductivity of SnO by doping with nitrogen and hydrogen. Journal of Applied Physics, 125(8), 085703. Doi: 10.1063/1.5052606.
Bu, I. Y. Y. (2016). Sol-gel production of p-type ZnO thin film by using sodium doping. Superlattices and Microstructures, 96, 59-66. Doi: 10.1016/j.spmi.2016.05.011
Caraveo-Frescas, J. A., Nayak, P. K., Al-Jawhari, H. A., Granato, D. B., Schwingenschlögl, U., & Alshareef, H. N. (2013). Record mobility in transparent p-type tin monoxide films and devices by phase engineering. ACS Nano, 7(6), 5160-5167. Doi: 10.1021/nn400852r
Dai, L. P., Deng, H., Mao, F. Y., & Zang, J. D. (2008). The recent advances of research on p-type ZnO thin film. Journal of Materials Science: Materials in Electronics, 19(8-9), 727-734.
Doi: 10.1007/s10854-007-9398-y
Granato, D. B., Caraveo-Frescas, J. A., Alshareef, H. N., & Schwingenschlögl, U. (2013). Enhancement of p-type mobility in tin monoxide by native defects. Applied Physics Letters, 102, 212105. Doi: 10.1063/1.4808382.
Guillén, C., & Herrero, J. (2019). P-type SnO thin films prepared by reactive sputtering at high deposition rates. Journal of Materials Science and Technology, 35(8), 1706-1711. Doi: 10.1016/j.jmst.2019.03.034
Guo, W., Zhang, Y., Liu, Z., & Wu, H. (2010). Microstructure, optical, and electrical properties of p-type SnO thin films. Applied Physics Letters, 96(4), 12-15. Doi: 10.1063/1.3277153
Hien, V. X., Lee, J. H., Kim, J. J., & Heo, Y. W. (2014). Structure and NH3 sensing properties of SnO thin film deposited by RF magnetron sputtering. Sensors and Actuators B: Chemical, 194, 134-141. Doi: 10.1016/j.snb.2013.12.086
Jang, Y., Lee, H., & Char, K. (2020). Transparent thin film transistors of polycrystalline SnO2-x and epitaxial SnO2-x. AIP Advances, 10(3). Doi: 10.1063/1.5143468.
Kim, H. Y., Nam, J. H., George, S. M., Park, J. S., Park, B. K., Kim, G. H., ... Han, J. H. (2019). Phase-controlled SnO2 and SnO growth by atomic layer deposition using Bis (N-ethoxy-2, 2-dimethyl propanamido) tin precursor. Ceramics International, 45(4), 5124-5132.
Doi: 10.1016/j.ceramint.2018.09.263
Lee, J. H., Lee, J. H., Choi, Y., Kim, J. J., & Kim, D. H. (2021). Undoped tin dioxide transparent electrodes for efficient and cost-effective indoor organic photovoltaics (SnO2 electrode for indoor organic photovoltaics). NPG Asia Materials, 13(1). Doi: 10.1038/s41427-021-00310-2
Lee, S. J., Choi, S. M., Kim, M. K., Yoon, J. W., & Kim, K. H. (2018). Composition, Microstructure and Electrical Performances of Sputtered SnO Thin Film for p-Type Oxide Semiconductor. ACS Applied Materials & Interfaces, 10(52), 45090-45098. Doi: 10.1021/acsami.7b17906
Liang, L. Y., Liu, Z. M., Cao, H. T., & Pan, X. Q. (2010). Microstructural, optical, and electrical properties of SnO thin films prepared on quartz via a two-step method. ACS Applied Materials & Interfaces, 2(4), 1060-1065. Doi: 10.1021/am900838z
Luangchaisri, C., Dumrongrattana, S., & Rakkwamsuk, P. (2012). Effect of heat treatment on electrical properties of fluorine doped tin dioxide films prepared by ultrasonic spray pyrolysis technique. Procedia Engineering, 32, 663-669. Doi: 10.1016/j.proeng.2012.01.1324
Luo, H., Liang, L. Y., Cao, H. T., Liu, Z. M., & Zhuge, F. (2012). Structural, Chemical, Optical, and Electrical Evolution of SnOx Films Deposited by Reactive rf Magnetron Sputtering. Applied Materials & Interfaces, 4, 5673-5677. Doi: 10.1021/am3015215
Minami, T. (2000). New n-Type TCOs. MRS Bulletin, 25(8), 38-44.
Pan, L., Li, W., Yang, S. E., Zang, J., Guo, H., Xia, T., ... Chen, Y. (2019). Effects of annealing conditions on the properties of SnO films deposited by e-beam evaporation process. Materials Letters, 257, 126737. Doi: 10.1016/j.matlet.2019.126737
Pham, H. P., Nguyen, Q. L., Pham, V. H., Nguyen, V. L., Nguyen, H. K., Nguyen, H. T., ... Nguyen, H. T. (2019). Effects of substrate temperature on characteristics of the p-type Ag-doped SnOx thin films prepared by reactive DC magnetron sputtering. Journal of Photochemistry and Photobiology A: Chemistry, 388, 112157. Doi: 10.1016/j.jphotochem.2019.112157
Pham, H. P., Thuy, T. G. L., Tran, Q. T., Nguyen, H. H., My Hoa, H. T., Thi Thu, H., & Cuong, T. V. (2017). Characterization of Ag-doped p-type SnO thin films prepared by DC magnetron sputtering. Journal of Nanomaterials, 2017. Doi: 10.1155/2017/8360823
Priyanka, L., Hymavathi, B., & Kumar, B. R. (2020). Effect of rotational speed on structural and optical properties of spin coated SnO thin films. IOP Conference Series: Materials Science and Engineering, 998(1). Doi: 10.1088/1757-899X/998/1/012012
Singh, C. C., Roy Choudhury, A. N., Sutar, D. S., & Sarkar, S. K. (2021). Plasma-assisted combustion synthesis of p -type transparent Cu incorporated NiO thin films - Correlation between deposition chemistry and charge transport characteristics. Journal of Applied Physics, 129(9), 095304. Doi: 10.1063/5.0036015
So, H. S., Park, J. W., Jung, D. H., Ko, K. H., & Lee, H. (2015). Optical properties of amorphous and crystalline Sb-doped SnO2 thin films studied with spectroscopic ellipsometry: Optical gap energy and effective mass. Journal of Applied Physics, 118(8). Doi: 10.1063/1.4929487
Suman, P. H., Felix, A. A., Tuller, H. L., Varela, J. A., & Orlandi, M. O. (2015). Comparative gas sensor response of SnO2, SnO and Sn3O4 nanobelts to NO2 and potential interferents. Sensors and Actuators B: Chemical, 208, 122-127. Doi: 10.1016/j.snb.2014.10.119
Togo, A., et al. (2006). First-principles calculations of native defects in tin monoxide. Physical Review B - Condensed Matter and Materials Physics, 74(19), 195128.
Doi: 10.1103/PhysRevB.74.195128
Togo, A., Oba, F., Tanaka, I., & Tatsumi, K. (2006). First-principles calculations of native defects in tin monoxide. Physical Review B - Condensed Matter and Materials Physics, 74(19), 195128. Doi: 10.1103/PhysRevB.74.195128
Varley, J. B. et al. (2013). Ambipolar doping in SnO. Applied Physics Letters, 103(8).
Doi: 10.1063/1.4819068
Wasly, H. S., El-Sadek, A., Elnobi, S., & Abuelwafa, A. A. (2022). Morphological, structural, and optical properties of flexible Tin Oxide (II) thin film via thermal evaporation technique. The European Physical Journal Plus, 137(1), 1-10. Doi: 10.1140/epjp/s13360-022-02349-8
Yang, Y., Pritzker, M., & Li, Y. (2019). Electrodeposited p-type Cu2O thin films at high pH for all-oxide solar cells with improved performance. Thin Solid Films, 676, 42-53.
Doi: 10.1016/j.tsf.2019.02.014